Breaking through the Thermodynamics “Wilds” of Metal–Organic Chemical Vapor Deposition Precursors: Metal tris-Acetylacetonates

Metal acetylacetonates belong to the β-diketonate family and are considered as classics among precursors for metal–organic chemical vapor deposition (MOCVD). The success of film preparation is crucially dependent on volatilization thermodynamics used. Data metal in huge disarray. We amassed analyzed experimental data pressures enthalpies entropies fusion, vaporization, sublimation acetylacetonate tris-complexes metals(III) (Al, Sc, Cr, Mn, Fe, Co, Ru, Rh, In, Ir) available literary sources. In addition, saturated over crystalline Al(III), Cr(III), In(III) corresponding thermodynamic properties were determined. New findings enabled us arbitrate conflict literature data. sublimation, fusion adjusted reference temperature a correct comparison using empirically estimated differences heat capacities. capacity phase was shown depend weakly atom. As result, reliable set mentioned processes fundamental importance derived ten complexes. Relationships between volatility structure established depending central metal. suggested algorithm can be fairly easily transferred or other isoligand complexes with metals different valence.